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A study on the target erosion and film deposition in a magnetron sputtering system

Authors

Choi Sun-Hee; Yeong-Ho Park; Ui-Hui Kwon; Won-Jong Lee

Citation

The 4th Asian-European International Conference on Plasma Surface Engineering, pp.106

Keywords

target erosion

URI

https://pubs.kist.re.kr/handle/201004/106106

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KIST Conference Paper > Others

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