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dc.contributor.author김용국-
dc.contributor.author배용환-
dc.contributor.author강유리-
dc.contributor.authorKim Jai Kyeong-
dc.contributor.authorKIM SOO WON-
dc.contributor.authorJu Byeong Kwon-
dc.date.accessioned2024-01-13T11:33:11Z-
dc.date.available2024-01-13T11:33:11Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106362-
dc.languageEnglish-
dc.subjectFBAR-
dc.subjectthin wafer-
dc.subjectMEMS-
dc.subjectpiezoelectric effect-
dc.titleFabrication of flexible FBAR using thin silicon wafer.-
dc.title.alternative박막 실리콘 웨이퍼를 이용한 압전박막공진기 제작 =-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국 MEMS 학술대회, pp.380 - 383-
dc.citation.title한국 MEMS 학술대회-
dc.citation.startPage380-
dc.citation.endPage383-
dc.citation.conferencePlaceKO-
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