DSpace at KIST: Fabrication of photoresist V-groove for alignment of micro optical elements

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DC Field	Value	Language
dc.contributor.author	이준섭	-
dc.contributor.author	Shin Hyun Joon	-
dc.contributor.author	송석호	-
dc.contributor.author	김필수	-
dc.contributor.author	오차환	-
dc.contributor.author	Moon Sung Wook	-
dc.date.accessioned	2024-01-13T11:33:22Z	-
dc.date.available	2024-01-13T11:33:22Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/106375	-
dc.language	English	-
dc.subject	감광제	-
dc.subject	V-groove	-
dc.subject	식각	-
dc.subject	광소자	-
dc.title	Fabrication of photoresist V-groove for alignment of micro optical elements	-
dc.title.alternative	감광제를 이용한 미소 광소자 정렬용 V-groove 의 제작	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	제 10 회 광전자 및 광통신 학술회의, pp.555 - 556.	-
dc.citation.title	제 10 회 광전자 및 광통신 학술회의	-
dc.citation.startPage	555	-
dc.citation.endPage	556.	-
dc.citation.conferencePlace	KO	-

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