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Fabrication of photoresist V-groove for alignment of micro optical elements

Other Titles

감광제를 이용한 미소 광소자 정렬용 V-groove 의 제작

Authors

이준섭; Shin Hyun Joon; 송석호; 김필수; 오차환; Moon Sung Wook

Citation

제 10 회 광전자 및 광통신 학술회의, pp.555 - 556.

Keywords

감광제; V-groove; 식각; 광소자

URI

https://pubs.kist.re.kr/handle/201004/106375

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KIST Conference Paper > Others

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