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A thin film condition of material for AR and HR coating by the DC/RF magnetron sputter

Other Titles

DC/RF magnetron sputter를 이용한 무반사 및 고반사 박막증착

Authors

양진석; Cho Woon Jo; 이천; Kim Dong Woo; 신춘교

Citation

2003년도 한국전기전자재료학회 춘계학술대회논문집 = Proceeding of 2003 Spring Symposium of KIEE, pp.206 - 209

Keywords

AR and HR coating; refractive index; growth rate; RF power; the ratio of Gas(Ar:O2)

URI

https://pubs.kist.re.kr/handle/201004/106420

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KIST Conference Paper > Others

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