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dc.contributor.authorKIM HYUNG JOON-
dc.contributor.authorYong-Bum Kim-
dc.contributor.authorJaebum Park-
dc.contributor.authorKim, Tae Song-
dc.date.accessioned2024-01-13T12:02:38Z-
dc.date.available2024-01-13T12:02:38Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106590-
dc.languageEnglish-
dc.subjectthick film-
dc.subjectPZT-
dc.subjectcantilever-
dc.subjectbiochip-
dc.titleBiological element detection sensor application of micromachined PZT thick film cantilever-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationIEEE Sensors 2003, Book of Abstracts, pp.353 - 354-
dc.citation.titleIEEE Sensors 2003, Book of Abstracts-
dc.citation.startPage353-
dc.citation.endPage354-
dc.citation.conferencePlaceUS-
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