Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | J.K.Kim | - |
dc.contributor.author | Park, Young Ju | - |
dc.contributor.author | D.Byun | - |
dc.contributor.author | E.K.Koh | - |
dc.date.accessioned | 2024-01-13T12:30:34Z | - |
dc.date.available | 2024-01-13T12:30:34Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/106726 | - |
dc.language | English | - |
dc.title | H₂/N₂ mixing plasma pretreatment of sapphire for GaN deposition | - |
dc.type | Conference | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | The 11th Seoul International Symposium on the Physics of Semiconductors and Applications-2002, pp.62 | - |
dc.citation.title | The 11th Seoul International Symposium on the Physics of Semiconductors and Applications-2002 | - |
dc.citation.startPage | 62 | - |
dc.citation.endPage | 62 | - |
dc.citation.conferencePlace | KO | - |
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