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dc.contributor.authorYOON JIN KOOK-
dc.contributor.authorByun Ji Young-
dc.contributor.authorKim Gyeung Ho-
dc.contributor.authorKim Jae Soo-
dc.date.accessioned2024-01-13T12:30:35Z-
dc.date.available2024-01-13T12:30:35Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106727-
dc.languageEnglish-
dc.titleFormation of MoSi₂-Si₃N₄ coatings on Mo substrate by CVD-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationGolden Research Conference ; High Temperature Materials, Processes, and Diagnostics, pp.1071 - 1076-
dc.citation.titleGolden Research Conference ; High Temperature Materials, Processes, and Diagnostics-
dc.citation.startPage1071-
dc.citation.endPage1076-
dc.citation.conferencePlaceUS-
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