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dc.contributor.authorKIM HYUNG JOON-
dc.contributor.author김용범-
dc.contributor.author최기용-
dc.contributor.authorKang Ji Yoon-
dc.contributor.authorKim Tae Song-
dc.date.accessioned2024-01-13T12:31:10Z-
dc.date.available2024-01-13T12:31:10Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106764-
dc.languageEnglish-
dc.subjectPZT-
dc.titleMicro mass detection devices for bio-chip based on PZT thick film cantilever.-
dc.title.alternativePZT 후막 캔틸레버를 이용한 바이오칩용 미세 무게 감지 소자 =-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation2002 년도 대한전기학회 하계학술대회 논문집, v.v. 15, pp.1988 - 1990.-
dc.citation.title2002 년도 대한전기학회 하계학술대회 논문집-
dc.citation.volumev. 15-
dc.citation.startPage1988-
dc.citation.endPage1990.-
dc.citation.conferencePlaceKO-
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