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Micro mass detection devices for bio-chip based on PZT thick film cantilever.

Other Titles

PZT 후막 캔틸레버를 이용한 바이오칩용 미세 무게 감지 소자 =

Authors

KIM HYUNG JOON; 김용범; 최기용; Kang Ji Yoon; Kim Tae Song

Citation

2002 년도 대한전기학회 하계학술대회 논문집, v.v. 15, pp.1988 - 1990.

Keywords

PZT

URI

https://pubs.kist.re.kr/handle/201004/106764

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KIST Conference Paper > Others

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