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dc.contributor.authorKIM IN TAY-
dc.contributor.author박윤권-
dc.contributor.author이시형-
dc.contributor.author이수현-
dc.contributor.authorLEE YUN HI-
dc.contributor.authorLee Jeon Kook-
dc.contributor.author김남수-
dc.contributor.authorJu Byeong Kwon-
dc.date.accessioned2024-01-13T12:32:07Z-
dc.date.available2024-01-13T12:32:07Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106824-
dc.languageEnglish-
dc.subjectFBAR-
dc.subjectpiezoelectric-
dc.subjectsurface micromachining-
dc.titleFilm bulk acoustic wave resonator using surface micromachining.-
dc.title.alternative표면 마이크로머시닝을 이용한 압전 박막 공진기 제작 =-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국전기전자재료학회 2002 년도 하계학술대회 논문집, v.3, no.1, pp.156 - 159-
dc.citation.title한국전기전자재료학회 2002 년도 하계학술대회 논문집-
dc.citation.volume3-
dc.citation.number1-
dc.citation.startPage156-
dc.citation.endPage159-
dc.citation.conferencePlaceKO-
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