DSpace at KIST: Fabrication of high aspect ratio metallic structures for optical devices using UV-LIGA process.

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DC Field	Value	Language
dc.contributor.author	KANG HO KWAN	-
dc.contributor.author	채경수	-
dc.contributor.author	Moon Sung Wook	-
dc.contributor.author	OH MYUNG HWAN	-
dc.date.accessioned	2024-01-13T12:32:16Z	-
dc.date.available	2024-01-13T12:32:16Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/106834	-
dc.language	English	-
dc.subject	MEMS	-
dc.title	Fabrication of high aspect ratio metallic structures for optical devices using UV-LIGA process.	-
dc.title.alternative	광소자 응용을 위한 UV-LIGA 공정 기반의 MEMS 소자 제작 =	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	전기전자재료학회 하계학술대회 논문집, v.v. 3, pp.1050 - 1053.	-
dc.citation.title	전기전자재료학회 하계학술대회 논문집	-
dc.citation.volume	v. 3	-
dc.citation.startPage	1050	-
dc.citation.endPage	1053.	-
dc.citation.conferencePlace	KO	-

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