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Influence of electrodes and bragg reflector on the quality of thin film bulk acoustic wave resonators

Authors

이시형; 김주형; G. D. Mansfeld; 윤기현; Lee Jeon Kook

Citation

IEEE Ultrasonic Ferroelectric & Frequency Control, Proeeding, pp.?

Keywords

bragg reflector; FBAR; Bulk acoustic wave resonators; AIN

URI

https://pubs.kist.re.kr/handle/201004/106852

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KIST Conference Paper > Others

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