DSpace at KIST: Implementation of a self-sensing MEMS cantilever for nanomanipulation

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DC Field	Value	Language
dc.contributor.author	KIM DEOK HO	-
dc.contributor.author	KIM KYUNG HWAN	-
dc.contributor.author	홍재완	-
dc.date.accessioned	2024-01-13T13:02:11Z	-
dc.date.available	2024-01-13T13:02:11Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/107094	-
dc.language	English	-
dc.subject	atomic force microscope(AFM)	-
dc.subject	self-sensing	-
dc.subject	MEMS	-
dc.subject	cantilever	-
dc.subject	nanomanipulation	-
dc.subject	piezoresistive	-
dc.title	Implementation of a self-sensing MEMS cantilever for nanomanipulation	-
dc.title.alternative	자기 검지식 MEMS 캔티레버를 이용한 나노매니퓰레이터 구현	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	제 4 회 MEMS 학술대회 논문집 = The 4th Korean MEMS Conference, pp.120 - 125	-
dc.citation.title	제 4 회 MEMS 학술대회 논문집 = The 4th Korean MEMS Conference	-
dc.citation.startPage	120	-
dc.citation.endPage	125	-
dc.citation.conferencePlace	KO	-

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