Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | JONG-YEON PARK | - |
| dc.contributor.author | KIM GEUN TAE | - |
| dc.contributor.author | KIM JINSEOK | - |
| dc.contributor.author | 한용희 | - |
| dc.contributor.author | Moon Sung Wook | - |
| dc.contributor.author | PARK JEONG HO | - |
| dc.date.accessioned | 2024-01-13T13:02:19Z | - |
| dc.date.available | 2024-01-13T13:02:19Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/107103 | - |
| dc.language | English | - |
| dc.subject | 3D MEMS antenna | - |
| dc.title | HARS (High Aspect Ratio Structure) fabrication for 3D MEMS antenna array using novel photolithography apparatus | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | The 9th Korean Conference on Semiconductors | - |
| dc.citation.title | The 9th Korean Conference on Semiconductors | - |
| dc.citation.conferencePlace | KO | - |
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