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HARS (High Aspect Ratio Structure) fabrication for 3D MEMS antenna array using novel photolithography apparatus

Authors

JONG-YEON PARK; KIM GEUN TAE; KIM JINSEOK; 한용희; Moon Sung Wook; PARK JEONG HO

Citation

The 9th Korean Conference on Semiconductors

Keywords

3D MEMS antenna

URI

https://pubs.kist.re.kr/handle/201004/107103

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KIST Conference Paper > Others

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