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dc.contributor.authorKIM IN TAY-
dc.contributor.author박윤권-
dc.contributor.author김용국-
dc.contributor.authorLEE YUN HI-
dc.contributor.authorLee Jeon Kook-
dc.contributor.author김남수-
dc.contributor.authorJu Byeong Kwon-
dc.date.accessioned2024-01-13T13:04:03Z-
dc.date.available2024-01-13T13:04:03Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/107214-
dc.languageEnglish-
dc.subjectFlexible MEMS-
dc.subjectthin wafer-
dc.subjectFBAR-
dc.titleDesign and fabrication of film bulk acoustic wave resonator-
dc.title.alternative압전박막공진기 설계 및 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationSENSORS CONFERENCE 2002, pp.48 - 51-
dc.citation.titleSENSORS CONFERENCE 2002-
dc.citation.startPage48-
dc.citation.endPage51-
dc.citation.conferencePlaceKO-
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