DSpace at KIST: SiC epi-layer growth using single precursor

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DC Field	Value	Language
dc.contributor.author	노대호	-
dc.contributor.author	Byun Dongjin	-
dc.contributor.author	Kim Jae Soo	-
dc.contributor.author	YOON JIN KOOK	-
dc.contributor.author	진정근	-
dc.contributor.author	lee jong kwon	-
dc.date.accessioned	2024-01-13T13:04:09Z	-
dc.date.available	2024-01-13T13:04:09Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/107220	-
dc.language	English	-
dc.subject	단일전구체	-
dc.title	SiC epi-layer growth using single precursor	-
dc.title.alternative	단일전구체를 사용한 SiC 박막의 성장	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	2002 년도 한국재료학회 추계학술발표강연 및 논문개요집, pp.100	-
dc.citation.title	2002 년도 한국재료학회 추계학술발표강연 및 논문개요집	-
dc.citation.startPage	100	-
dc.citation.endPage	100	-
dc.citation.conferencePlace	KO	-

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