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dc.contributor.authorPARK HYUN MEE-
dc.contributor.authorKIM YOUNG MAN-
dc.contributor.authorRyu Jae Chun-
dc.contributor.authorCheong Chan Seong-
dc.contributor.author이대운-
dc.contributor.authorLEE KANG BONG-
dc.date.accessioned2024-01-13T13:34:05Z-
dc.date.available2024-01-13T13:34:05Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/107483-
dc.languageEnglish-
dc.titleEvaluation of origin for trace organic contaminants adsorbing on the surface of silicon wafers in manufacturing line by home-built thermal desorption and P&T GC-MS-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitation2001 Asianalyisis VI Conference Abstract-
dc.citation.title2001 Asianalyisis VI Conference Abstract-
dc.citation.conferencePlaceJA-
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