A novel UV-LIGA process using PMER as a mold material for optical switch application

Authors
채경수김희연Moon Sung Wook한승호PARK JEONG HO
Citation
Transducers '01 Eurosensors XV
Keywords
PMER
URI
https://pubs.kist.re.kr/handle/201004/107585
Appears in Collections:
KIST Conference Paper > Others
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