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dc.contributor.authorYohan Sun-
dc.contributor.authorSe-Young Seo-
dc.contributor.authorJung Hoon Shin-
dc.contributor.authorTae Gon Kim-
dc.contributor.authorCheong Nam Whang-
dc.contributor.authorSONG JONG HAN-
dc.date.accessioned2024-01-13T14:01:48Z-
dc.date.available2024-01-13T14:01:48Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/107606-
dc.languageEnglish-
dc.subjectPE-CVD-
dc.titleIon beam enhanced formation and luminescence of Si Nanoclusters from α -Sio// χ-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationMat. Res. Soc. Symp. Proc., v.647-
dc.citation.titleMat. Res. Soc. Symp. Proc.-
dc.citation.volume647-
dc.citation.conferencePlaceUS-
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