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dc.contributor.authorCHOI CHANG HOON-
dc.contributor.author박호영-
dc.contributor.authorNAM SANG CHUL-
dc.contributor.authorYoon Young Soo-
dc.contributor.authorCho Won Il-
dc.contributor.authorCho Byung Won-
dc.contributor.authorYun Kyung Suk-
dc.contributor.author탁용석-
dc.date.accessioned2024-01-13T14:03:56Z-
dc.date.available2024-01-13T14:03:56Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/107746-
dc.languageEnglish-
dc.subjectlithium phosphorous Oxy Nitride(lipon)-
dc.subjectthin film battery-
dc.titleEffect of RF sputtering power in Lipon solid electrolyte ionic conductivity for thin film lithium rechargeable microbatteries-
dc.title.alternativeLithium phosphorous oxy nitride(Lipon) 고체전해질 박막의 이온전도도에 미치는 RF sputtering power 의 효과-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국전기화학회 학술발표회 초록집-
dc.citation.title한국전기화학회 학술발표회 초록집-
dc.citation.conferencePlaceKO-
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