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Correlation between surface modification of HSQ films and phase transformation of Cu/W-N bilayers deposition on the NH3 plasma treated HSQ films

Authors

김동준; 심현상; 박종완; Kim Yong Tae; Kim Seong Il; KIM CHUN KEUN

Citation

Material Research Society (MRS) 2001 spring Meeting, pp.231.

Keywords

HSQ

URI

https://pubs.kist.re.kr/handle/201004/107778

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KIST Conference Paper > Others

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