Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | JONG-YEON PARK | - |
| dc.contributor.author | Kun-Tae Kim | - |
| dc.contributor.author | Moon Sung Wook | - |
| dc.contributor.author | PARK JEONG HO | - |
| dc.date.accessioned | 2024-01-13T14:32:48Z | - |
| dc.date.available | 2024-01-13T14:32:48Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/107935 | - |
| dc.language | English | - |
| dc.subject | MRPBI system | - |
| dc.subject | UV-lithography | - |
| dc.subject | IR sensor | - |
| dc.subject | 3D MEMS antenna | - |
| dc.title | Fabrication of 3D feed horn shape MEMS antenna array using MRPBI (mirror reflected parallel beam illuminator) system with an ultra-slow-rotated and inclined X-Y-Z stage | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | Proceedings of MRS, v.687, pp.113 - 124 | - |
| dc.citation.title | Proceedings of MRS | - |
| dc.citation.volume | 687 | - |
| dc.citation.startPage | 113 | - |
| dc.citation.endPage | 124 | - |
| dc.citation.conferencePlace | US | - |
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