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EL-MoM2 effects of Ta2O5 and Al2O3 buffer insulators on electrical characteristics of Pt/SrBi2Ta2O9/Si gate structure

Authors

최훈상; Kim Yong Tae; M. Ischida; 최인훈; 이창우

Citation

2001 AVS 48th International Symposium, October 28-November 2, 2001 Moscone Center and Marriott Hotel, pp.7

Keywords

NDRO-FRAM; SrBi2Ta2O9; buffer layer; Al2O3

URI

https://pubs.kist.re.kr/handle/201004/107937

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KIST Conference Paper > Others

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