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dc.contributor.author이정훈-
dc.contributor.author윤기현-
dc.contributor.authorKim Tae Song-
dc.date.accessioned2024-01-13T15:00:39Z-
dc.date.available2024-01-13T15:00:39Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108058-
dc.languageEnglish-
dc.subjectPZT-
dc.titleElectromechanical characterization of micromachined PZT cantilever-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationProceedings of the International Sensor Conference 2001, pp.43 - 44-
dc.citation.titleProceedings of the International Sensor Conference 2001-
dc.citation.startPage43-
dc.citation.endPage44-
dc.citation.conferencePlaceKO-
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