Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 심현상 | - |
| dc.contributor.author | Kim Yong Tae | - |
| dc.contributor.author | H. Jeon | - |
| dc.date.accessioned | 2024-01-13T15:00:45Z | - |
| dc.date.available | 2024-01-13T15:00:45Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/108064 | - |
| dc.language | English | - |
| dc.subject | atomic layer deposition | - |
| dc.subject | tungsten nitride | - |
| dc.title | DI-WeM8 characteristics of tungsten nitride atomic layer deposition | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | 2001 AVS 48th International Symposium, pp.153 | - |
| dc.citation.title | 2001 AVS 48th International Symposium | - |
| dc.citation.startPage | 153 | - |
| dc.citation.endPage | 153 | - |
| dc.citation.conferencePlace | US | - |
- Appears in Collections:
- KIST Conference Paper > Others
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