KIST Library Institutional Repository

DI-WeM8 characteristics of tungsten nitride atomic layer deposition

Authors

심현상; Kim Yong Tae; H. Jeon

Citation

2001 AVS 48th International Symposium, pp.153

Keywords

atomic layer deposition; tungsten nitride

URI

https://pubs.kist.re.kr/handle/201004/108064

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML