DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorJu Byeong Kwon-
dc.contributor.author강경두-
dc.contributor.author정수태-
dc.contributor.authorJung Jae Hoon-
dc.contributor.author정귀상-
dc.date.accessioned2024-01-13T15:04:59Z-
dc.date.available2024-01-13T15:04:59Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108307-
dc.subjectwafer bonding-
dc.title.alternativeCavity를 갖는 SDB SOI 구조의 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation전기전자재료학회 하계학술대회, pp.557 - 560-
dc.citation.title전기전자재료학회 하계학술대회-
dc.citation.startPage557-
dc.citation.endPage560-
dc.citation.conferencePlaceKO-
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