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dc.contributor.authorJu Byeong Kwon-
dc.contributor.author박흥우-
dc.contributor.author이덕중-
dc.contributor.author서상원-
dc.contributor.author김남수-
dc.contributor.authorPARK JEONG HO-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T15:30:50Z-
dc.date.available2024-01-13T15:30:50Z-
dc.date.created2021-09-29-
dc.date.issued2000-07-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108326-
dc.subjectMEMS-
dc.title전계 방출 현상을 이용한 마이크로 터널링 센서의 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationField Emission Workshop '00, pp.?-
dc.citation.titleField Emission Workshop '00-
dc.citation.startPage?-
dc.citation.endPage?-
dc.citation.conferencePlaceKO-
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