DSpace at KIST: Digital deposition of tungsten nitride thin layer by cyclic exposure of WF//6 and NH₃

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DC Field	Value	Language
dc.contributor.author	심현상	-
dc.contributor.author	김동준	-
dc.contributor.author	Kim Yong Tae	-
dc.contributor.author	전형탁	-
dc.contributor.author	PARK YOUNG KYUN	-
dc.contributor.author	Kim Seong Il	-
dc.date.accessioned	2024-01-13T15:31:26Z	-
dc.date.available	2024-01-13T15:31:26Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/108365	-
dc.language	English	-
dc.subject	cyclic exposure	-
dc.title	Digital deposition of tungsten nitride thin layer by cyclic exposure of WF//6 and NH₃	-
dc.type	Conference	-
dc.description.journalClass	1	-
dc.identifier.bibliographicCitation	The International Conference on Electrical Engineering 2000, pp.774 - 777	-
dc.citation.title	The International Conference on Electrical Engineering 2000	-
dc.citation.startPage	774	-
dc.citation.endPage	777	-
dc.citation.conferencePlace	JA	-

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