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dc.contributor.author심현상-
dc.contributor.author김동준-
dc.contributor.authorKim Yong Tae-
dc.contributor.author전형탁-
dc.contributor.authorPARK YOUNG KYUN-
dc.contributor.authorKim Seong Il-
dc.date.accessioned2024-01-13T15:31:26Z-
dc.date.available2024-01-13T15:31:26Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108365-
dc.languageEnglish-
dc.subjectcyclic exposure-
dc.titleDigital deposition of tungsten nitride thin layer by cyclic exposure of WF//6 and NH₃-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationThe International Conference on Electrical Engineering 2000, pp.774 - 777-
dc.citation.titleThe International Conference on Electrical Engineering 2000-
dc.citation.startPage774-
dc.citation.endPage777-
dc.citation.conferencePlaceJA-
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