Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 심현상 | - |
| dc.contributor.author | 김동준 | - |
| dc.contributor.author | Kim Yong Tae | - |
| dc.contributor.author | 전형탁 | - |
| dc.contributor.author | PARK YOUNG KYUN | - |
| dc.contributor.author | Kim Seong Il | - |
| dc.date.accessioned | 2024-01-13T15:31:26Z | - |
| dc.date.available | 2024-01-13T15:31:26Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/108365 | - |
| dc.language | English | - |
| dc.subject | cyclic exposure | - |
| dc.title | Digital deposition of tungsten nitride thin layer by cyclic exposure of WF//6 and NH₃ | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | The International Conference on Electrical Engineering 2000, pp.774 - 777 | - |
| dc.citation.title | The International Conference on Electrical Engineering 2000 | - |
| dc.citation.startPage | 774 | - |
| dc.citation.endPage | 777 | - |
| dc.citation.conferencePlace | JA | - |
- Appears in Collections:
- KIST Conference Paper > Others
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