DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorHAN SUNG HAN-
dc.contributor.author안창규-
dc.contributor.author경제홍-
dc.contributor.authorCHO SEONG HOON-
dc.contributor.author최승철-
dc.date.accessioned2024-01-13T15:32:29Z-
dc.date.available2024-01-13T15:32:29Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108427-
dc.languageEnglish-
dc.subjectAIN-
dc.subjectMOCVD-
dc.subjectsingle precursor-
dc.titleThe synthesis of a suitable single precursor for AIN thin films-
dc.title.alternativeAIN thin films을 위한 적합한 단일 전구체 합성-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation2000 년 춘계 마이크로전자페키징학회, pp.?-
dc.citation.title2000 년 춘계 마이크로전자페키징학회-
dc.citation.startPage?-
dc.citation.conferencePlaceKO-
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