Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Ju Byeong Kwon | - |
| dc.contributor.author | 박흥우 | - |
| dc.contributor.author | 이덕중 | - |
| dc.contributor.author | SON YONG BAE | - |
| dc.contributor.author | PARK JEONG HO | - |
| dc.contributor.author | OH MYUNG HWAN | - |
| dc.date.accessioned | 2024-01-13T15:33:02Z | - |
| dc.date.available | 2024-01-13T15:33:02Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/108461 | - |
| dc.language | English | - |
| dc.subject | MEMS | - |
| dc.title | Vacuum packaging and operating properties of micro-tunneling sensors | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | 5th ISMP, pp.110 | - |
| dc.citation.title | 5th ISMP | - |
| dc.citation.startPage | 110 | - |
| dc.citation.endPage | 110 | - |
| dc.citation.conferencePlace | KO | - |
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