DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author김현호-
dc.contributor.author이시형-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorLee Jeon Kook-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.authorKIM SOO WON-
dc.date.accessioned2024-01-13T15:34:43Z-
dc.date.available2024-01-13T15:34:43Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108565-
dc.languageEnglish-
dc.subjectthin film resonator-
dc.subjectTMAH-
dc.subjectsurface micromachining-
dc.subjectPiezoelectric-
dc.subjectAIN-
dc.titleA new type thin film bulk acoustic resonator(TFR) using surface micromachining technique-
dc.title.alternative표면 마이크로머시닝 기술을 사용한 새로운 형태의 압전박막공진기-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제2회 MEMS학술대회, pp.173 - 178-
dc.citation.title제2회 MEMS학술대회-
dc.citation.startPage173-
dc.citation.endPage178-
dc.citation.conferencePlaceKO-
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