KIST Library Institutional Repository

Plasma source ion implantations for shallow p+/n junction

Authors

조정희; HAN SEUNG HEE; LEE YEON HEE; 김옥경; 김곤호; 김영우; LIM HYUN EUI; SUH MOO JIN

Citation

제18회 한국진공학회 학술발표회, pp.180

Keywords

plasma source ion implantation; shallow p+/n junction; electrical characteristics

URI

https://pubs.kist.re.kr/handle/201004/108621

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML