keV and MeV ion beam modification of polyimide films

Authors
LEE YEON HEEHAN SEUNG HEESONG JONG HANLIM HYUN EUISUH MOO JIN
Citation
제18회 한국진공학회 학술발표회, pp.170
Keywords
polymer modification; plasma source ion implantation; surface resistivity
URI
https://pubs.kist.re.kr/handle/201004/108626
Appears in Collections:
KIST Conference Paper > Others
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