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dc.contributor.author박흥우-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.author이덕중-
dc.contributor.authorPARK JEONG HO-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T16:01:25Z-
dc.date.available2024-01-13T16:01:25Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108646-
dc.languageEnglish-
dc.subjectelectrostatically vacuum seal-
dc.subjecttunneling magnetic sensors-
dc.titleElectrostatically vacuum sealed tunneling magnetic sensors-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationSPIE Smart Materials and MEMS-
dc.citation.titleSPIE Smart Materials and MEMS-
dc.citation.conferencePlaceKO-
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