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Electrostatically vacuum sealed tunneling magnetic sensors

Authors

박흥우; Ju Byeong Kwon; 이덕중; PARK JEONG HO; OH MYUNG HWAN

Citation

SPIE Smart Materials and MEMS

Keywords

electrostatically vacuum seal; tunneling magnetic sensors

URI

https://pubs.kist.re.kr/handle/201004/108646

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KIST Conference Paper > Others

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