DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorSEO SANG WON-
dc.contributor.authorKIM HOON-
dc.contributor.author박종원-
dc.contributor.authorLEE YUN HI-
dc.contributor.author박공석-
dc.contributor.authorJung Jae Hoon-
dc.contributor.author장진-
dc.contributor.author김동호-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.author김남수-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorKIM HOON-
dc.date.accessioned2024-01-13T16:02:34Z-
dc.date.available2024-01-13T16:02:34Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108717-
dc.languageEnglish-
dc.subjectetched feature-
dc.subjectthin chromium film-
dc.subjectsubstrate temperature-
dc.titleEffect of substrate temperature on etched feature of thin chromium film and its application-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationISPSA 2000, pp.197-
dc.citation.titleISPSA 2000-
dc.citation.startPage197-
dc.citation.endPage197-
dc.citation.conferencePlaceKO-
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