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The effect of heat treatments on the electron emission of amorphous carbon film deposited by RF magnetron sputtering method

Authors

Ju Byeong Kwon; 장윤택; LEE YUN HI; AHN JIN HO; OH MYUNG HWAN

Citation

제 7 회 반도체 학술대회, pp.663 - 664

Keywords

field emission

URI

https://pubs.kist.re.kr/handle/201004/108892

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KIST Conference Paper > Others

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