DSpace at KIST: A 40 nm nano-mold lithography

Full metadata record

DC Field	Value	Language
dc.contributor.author	Chang-Min Park	-
dc.contributor.author	최범호	-
dc.contributor.author	현찬경	-
dc.contributor.author	KIM EUN KYU	-
dc.contributor.author	황성우	-
dc.date.accessioned	2024-01-13T16:31:24Z	-
dc.date.available	2024-01-13T16:31:24Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/108911	-
dc.language	English	-
dc.subject	nano-mold	-
dc.title	A 40 nm nano-mold lithography	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	Proc. 7th Korean Conf. on Semiconductors = 제 7 회 한국반도체 학술대회, pp.321 - 322	-
dc.citation.title	Proc. 7th Korean Conf. on Semiconductors = 제 7 회 한국반도체 학술대회	-
dc.citation.startPage	321	-
dc.citation.endPage	322	-
dc.citation.conferencePlace	KO	-

Show Simple Item Record

KIST Library Institutional Repository