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Enhancement of Si nanocrystal luminescence from Silicon-rich silicon oxide by Nickel-induced nucleation

Authors

Jung H. Shin; 서세영; T. G. Kim; SONG JONG HAN

Citation

AVS International Conference on Microelectronics and Interfaces, pp.?

Keywords

ion implantation; nanocrystal; silicon; SiO2; nucleation

URI

https://pubs.kist.re.kr/handle/201004/108947

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KIST Conference Paper > Others

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