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dc.contributor.author백남석-
dc.contributor.author김환규-
dc.contributor.authorHwang Seung Sang-
dc.contributor.authorHong Soon Man-
dc.date.accessioned2024-01-13T16:33:02Z-
dc.date.available2024-01-13T16:33:02Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109012-
dc.languageEnglish-
dc.subjectorganic-inorganic hybrid-
dc.subjectSol-Gel Reaction-
dc.subjectInterlayer Dielectrics-
dc.titlePreparation and characterization of organic-inorganic hybrid materials incorporating voids via Sol-Gel reaction for interlayer dielectrics-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationThe 10th Korea-Japan Joint Forum (KJF'99), pp.107-
dc.citation.titleThe 10th Korea-Japan Joint Forum (KJF'99)-
dc.citation.startPage107-
dc.citation.endPage107-
dc.citation.conferencePlaceKO-
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