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Preparation and characterization of organic-inorganic hybrid materials incorporating voids via Sol-Gel reaction for interlayer dielectrics

Authors

백남석; 김환규; Hwang Seung Sang; Hong Soon Man

Citation

The 10th Korea-Japan Joint Forum (KJF'99), pp.107

Keywords

organic-inorganic hybrid; Sol-Gel Reaction; Interlayer Dielectrics

URI

https://pubs.kist.re.kr/handle/201004/109012

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KIST Conference Paper > Others

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