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dc.contributor.author박윤권-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.author전호승-
dc.contributor.authorYoon Young Soo-
dc.contributor.authorOh Young-Jei-
dc.contributor.authorLEE YUN HI-
dc.contributor.authorSUH SANG HEE-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.author김철주-
dc.date.accessioned2024-01-13T17:00:36Z-
dc.date.available2024-01-13T17:00:36Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109130-
dc.languageEnglish-
dc.subjectpyroelectric sensor-
dc.subjectPZT film-
dc.subjectMEMSS-
dc.subjectmicromachining-
dc.titleCharacteristic estimation of the formation and etching of PZT thin films for pyroelectric IR sensor application-
dc.title.alternative초전형 적외선 센서 제작을 위한 PZT박막 형성 및 식각 특성 평가-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation1999년도 대한전기학회 하계학술대회 논문집, pp.3304 - 3306-
dc.citation.title1999년도 대한전기학회 하계학술대회 논문집-
dc.citation.startPage3304-
dc.citation.endPage3306-
dc.citation.conferencePlaceKO-
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