DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author김영우-
dc.contributor.author조정희-
dc.contributor.authorLIM HYUN EUI-
dc.contributor.authorHAN SEUNG HEE-
dc.contributor.authorLEE YEON HEE-
dc.contributor.author김곤호-
dc.date.accessioned2024-01-13T17:00:53Z-
dc.date.available2024-01-13T17:00:53Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109146-
dc.subjectplasma source ion implantation-
dc.title.alternative시변환 쉬스 거동에 대한 탐침 전류 곡선의 해석-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제 17 회 한국진공학회, pp.222-
dc.citation.title제 17 회 한국진공학회-
dc.citation.startPage222-
dc.citation.endPage222-
dc.citation.conferencePlaceKO-
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