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dc.contributor.author김민철-
dc.contributor.author박근우-
dc.contributor.authorKANG HO KWAN-
dc.contributor.author심태석-
dc.contributor.authorMoon Sung Wook-
dc.contributor.author김도훈-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T17:00:55Z-
dc.date.available2024-01-13T17:00:55Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109148-
dc.languageEnglish-
dc.subjectmicrobolometer-
dc.subjectvanadium oxide-
dc.subjectTCR-
dc.titleA study for fabrication of microbolometer using by vanadium oxide thin films-
dc.title.alternative산화 바나듐 박막을 이용한 마이크로 볼로미터 제조에 관한 연구-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation1999 제 1 회 MEMS 학술대회 논문집 = 1999 Proceedings of the 1st Korean MEMS conference, pp.241 - 247-
dc.citation.title1999 제 1 회 MEMS 학술대회 논문집 = 1999 Proceedings of the 1st Korean MEMS conference-
dc.citation.startPage241-
dc.citation.endPage247-
dc.citation.conferencePlaceKO-
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