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Thermodynamic study of stress distribution in epitaxial Pb(Zr,Ti)O₃ (PZT) thin films

Authors

KIM HYUNG JOON; 오성훈; 장현명

Citation

3rd Korea-Japan Conference on Ferroelectrics

Keywords

thin film; PZT; stress; Thermodynamic

URI

https://pubs.kist.re.kr/handle/201004/109172

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KIST Conference Paper > Others

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