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dc.contributor.author임재홍-
dc.contributor.authorPARK YONG-WOOK-
dc.contributor.authorYOON SEOK JIN-
dc.contributor.author정형진-
dc.contributor.authorYoon Young Soo-
dc.date.accessioned2024-01-13T17:03:04Z-
dc.date.available2024-01-13T17:03:04Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109278-
dc.languageEnglish-
dc.subjectpiezoresistivity-
dc.subjectpoly-crystalline silicon-
dc.subjectpressure sensor-
dc.subjectdiaphragm thickness-
dc.titleA study on fabrication of piezoresistive pressure sensor based on poly-Si-
dc.title.alternative벌크 마이크로 머쉬닝에 의한 다결정 실리콘 압력센서 제작 관한 연구-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국전기전자재료학회 '99 춘계학술대회 논문집, pp.677 - 680-
dc.citation.title한국전기전자재료학회 '99 춘계학술대회 논문집-
dc.citation.startPage677-
dc.citation.endPage680-
dc.citation.conferencePlaceKO-
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