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dc.contributor.author박흥우-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.author박윤권-
dc.contributor.author김철주-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T17:03:45Z-
dc.date.available2024-01-13T17:03:45Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109322-
dc.languageEnglish-
dc.subjectFEA-
dc.subjectFED-
dc.subjectMEMS-
dc.subjectpoly-Si emitter-
dc.subjectvacuum sensor-
dc.subjectcantilver-
dc.subjectfield emission-
dc.subjectlift-off-
dc.titleMicro-tunneling sensor for vacuum level evaluation of field emission display-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation1999 제1회 MEMS 학술대회 논문집 = 1999 Proceedings of the 1st Korean MEMS Conference, pp.255 - 258-
dc.citation.title1999 제1회 MEMS 학술대회 논문집 = 1999 Proceedings of the 1st Korean MEMS Conference-
dc.citation.startPage255-
dc.citation.endPage258-
dc.citation.conferencePlaceKO-
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